Microstructured polymer tips for scanning near-field optical microscopy

被引:9
作者
Stürmer, H
Köhler, JM
Jovin, TM
机构
[1] Inst Phys High Technol, D-07702 Jena, Germany
[2] Max Planck Inst Biophys Chem, D-37070 Gottingen, Germany
关键词
scanning probe microscopy; scanning near-field optical microscopy; atomic force microscopy; reactive ion etching; polymer tips;
D O I
10.1016/S0304-3991(97)00097-1
中图分类号
TH742 [显微镜];
学科分类号
摘要
A new technique for producing polymeric cantilevers with integrated tips for combined scanning-force microscopy/scanning near-field optical microscopy is described in this paper. By integration reactive ion of etched polymeric and fluorescent tips to polymer-based cantilevers, it will become possible to produce apertureless sensors for a scanning near-field optical microscope with the well-known atomic-force distance control. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:107 / 110
页数:4
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