共 40 条
[31]
ELECTRODE DESIGN FOR TESTING IN UNIFORM-FIELD GAPS
[J].
IEEE TRANSACTIONS ON POWER APPARATUS AND SYSTEMS,
1980, 99 (03)
:1235-1242
[32]
EUV-induced hydrogen plasma: pulsed mode operation and confinement in scanner
[J].
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3,
2021, 20 (03)
[33]
Advanced Particle Contamination Control in EUV Scanners
[J].
EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY X,
2019, 10957
[38]
van Minderhout B., 2021, MICROPARTICLE CHARGI
[39]
Walter R., 1923, Archiv fur Elektrotechnik, V12, P1, DOI [DOI 10.1007/BF01656573, 10.1007/BF01656573]