High-sensitivity photodetectors with on-chip pinhole for laser scanning microscopy

被引：3

作者：

Zappa, F ^{[1
]}

Ghioni, M

Zappa, R

Drodofsky, U

机构：

[1] Politecn Milan, DEI, I-20133 Milan, Italy

[2] STMicroelectronics, Agrate Brianza, Italy

[3] Carl Zeiss AG, D-7082 Oberkochen, Germany

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2000年 / 47卷 / 07期

关键词：

avalanche photodiodes; confocal microscopy; imaging; single-photon detectors;

D O I：

10.1109/16.848295

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We manufactured new high-sensitivity solid-state detectors, specifically designed for measurements in laser scanning microscopy (LSM), These single-photon avalanche diodes (SPAD's) improve the performance achievable with an LSM apparatus in the optical inspection of microelectronic devices and circuits. Innovative detector structures that incorporate an on-chip pinhole filter are presented. Experimental measurements show that SPAD's are better performing than standard photomultiplier tubes.

引用

页码：1472 / 1476

页数：5

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