Dynamic simulation of a resonant MEMS magnetometer in Simulink®

This paper presents an efficient and economical method of modelling MEMS devices at a system level. The system level approach of modelling allows designers to model MEMS devices at a system level and investigate the effect of changes in the mechanical structure, drive and pickoff electronic circuitry on the whole MEM system. This simulation technique is demonstrated with the investigation of the response times and signal strength of a resonant magnetic sensor working in the amplitude response mode. The simulation shows that for resonant sensors working in the amplitude mode the response times and sensitivities are determined by the system's resonant frequency and Q-factor. High Q systems lead to more sensitive devices but narrow the working bandwidth due to the increase in settling times. (C) 2004 Elsevier B.V. All rights reserved.