Fabrication of high fill-factor aspheric microlens array by digital maskless lithography

被引：9
|
作者：
Zhong, Kejun [1 ]
Zhang, Hailin [1 ]
Gao, Yiqing [1 ]
机构：
[1] Nanchang Hangkong Univ, Jiangxi Engn Lab Optoelect Testing Technol, Nanchang 330063, Jiangxi, Peoples R China
来源：
OPTIK | 2017年 / 142卷
关键词：
Fill-factor; Aspheric microlens array; Digital maskless lithography;
D O I：
10.1016/j.ijleo.2017.05.069
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A simple and effective method for fabricating high fill-factor aspheric microlens array using digital maskless lithography is reported. The method use the contour planes of the designed profile as binary image, which replace physical mask by DMD display. On the lithography system, the dose accumulated over multiple exposures and the exposure dose reconstructed in wafer, then the designed profile developed. Aspheric microlens arrays with hexagonal base and square base were produced by the method, and they were gapless at each microlens periphery, so the microlens array with fill-factor of 100%. (C) 2017 Elsevier GmbH. All rights reserved.
引用
收藏
页码：243 / 248
页数：6
相关论文
共 50 条
  • [31] Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method
    Chang, SI
    Yoon, JB
    OPTICS EXPRESS, 2004, 12 (25): : 6366 - 6371
  • [32] Enhancing the fill-factor of CMOS SPAD arrays using microlens integration
    Intermite, G.
    Warburton, R. E.
    McCarthy, A.
    Ren, X.
    Villa, F.
    Waddie, A. J.
    Taghizadeh, M. R.
    Zou, Y.
    Zappa, F.
    Tosi, A.
    Buller, G. S.
    PHOTON COUNTING APPLICATIONS 2015, 2015, 9504
  • [33] Microlens Array Fabricated by Gray-scale Lithography Maskless System
    Cirino, G. A.
    Lopera, S. A.
    Montagnoli, A. N.
    Mansano, R. D.
    Neto, L. G.
    MICROELECTRONICS TECHNOLOGY AND DEVICES - SBMICRO 2012, 2012, 49 (01): : 339 - 345
  • [34] Maskless lithography based on digital micromirror device (DMD) and double sided microlens and spatial filter array
    Dinh, Duc-Hanh
    Chien, Hung-Liang
    Lee, Yung-Chun
    OPTICS AND LASER TECHNOLOGY, 2019, 113 : 407 - 415
  • [35] Maskless fabrication of honeycomb random microlens array by a femtosecond laser
    Wang, Quanji
    Liu, Le
    Yang, Shaorui
    Yang, Zijing
    Xu, Xinke
    Wu, Si
    Su, Xiaohui
    Duan, Jun
    Xiong, Wei
    Deng, Leimin
    OPTICS AND LASER TECHNOLOGY, 2024, 171
  • [36] A Dual-Axis High Fill-Factor Micromirror Array for High Thermal Loads
    Ataman, C.
    Lani, S.
    Noell, W.
    Jutzi, F.
    Bayat, D.
    de Rooij, N.
    OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 2011, : 135 - 136
  • [37] Wavelength-selective switch based on a high fill-factor micromirror array
    Li, Sihua
    Wan, Zhujun
    Xu, Jing
    Zhong, Shaolong
    Wu, Yaming
    CHINESE OPTICS LETTERS, 2011, 9 (09)
  • [38] Liquid Crystal Lens Array with High Fill-Factor Fabricated by an Imprinting Technique
    Choi, Wonsuk
    Kim, Dong-Woo
    Lee, Sin-Doo
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2009, 508 : 35 - 51
  • [39] Research on hot embossing process of high fill factor microlens array
    Yiqing Wang
    Qing Zhang
    Xinbin Kuang
    Yucheng Ding
    Feng Chen
    Hongzhong Liu
    Microsystem Technologies, 2015, 21 : 2109 - 2114
  • [40] Research on hot embossing process of high fill factor microlens array
    Wang, Yiqing
    Zhang, Qing
    Kuang, Xinbin
    Ding, Yucheng
    Chen, Feng
    Liu, Hongzhong
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015, 21 (10): : 2109 - 2114
12345