Fabrication of high fill-factor aspheric microlens array by digital maskless lithography

被引：9
|
作者：
Zhong, Kejun [1 ]
Zhang, Hailin [1 ]
Gao, Yiqing [1 ]
机构：
[1] Nanchang Hangkong Univ, Jiangxi Engn Lab Optoelect Testing Technol, Nanchang 330063, Jiangxi, Peoples R China
来源：
OPTIK | 2017年 / 142卷
关键词：
Fill-factor; Aspheric microlens array; Digital maskless lithography;
D O I：
10.1016/j.ijleo.2017.05.069
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A simple and effective method for fabricating high fill-factor aspheric microlens array using digital maskless lithography is reported. The method use the contour planes of the designed profile as binary image, which replace physical mask by DMD display. On the lithography system, the dose accumulated over multiple exposures and the exposure dose reconstructed in wafer, then the designed profile developed. Aspheric microlens arrays with hexagonal base and square base were produced by the method, and they were gapless at each microlens periphery, so the microlens array with fill-factor of 100%. (C) 2017 Elsevier GmbH. All rights reserved.
引用
收藏
页码：243 / 248
页数：6
相关论文
共 50 条
  • [21] Fabrication of high fill factor cylindrical microlens array with isolated thermal reflow
    Qiu, Jinfeng
    Li, Mujun
    Ye, Huichun
    Yang, Chen
    Shi, Cuicui
    APPLIED OPTICS, 2018, 57 (25) : 7296 - 7302
  • [22] Fabrication of high quality aspheric microlens array by dose-modulated lithography and surface thermal reflow
    Huang, Shengzhou
    Li, Mujun
    Shen, Lianguan
    Qiu, Jinfeng
    Zhou, Youquan
    OPTICS AND LASER TECHNOLOGY, 2018, 100 : 298 - 303
  • [23] 3D Printing of a PDMS Cylindrical Microlens Array with 100% Fill-Factor
    Zhang, Houchao
    Qi, Tianyu
    Zhu, Xiaoyang
    Zhou, Longjian
    Li, Zhenghao
    Zhang, Yuan-Fang
    Yang, Wenchao
    Yang, Jianjun
    Peng, Zilong
    Zhang, Guangming
    Wang, Fei
    Guo, Pengfei
    Lan, Hongbo
    ACS APPLIED MATERIALS & INTERFACES, 2021, 13 (30) : 36295 - 36306
  • [24] New Dual-Curvature Microlens Array With High Fill-Factor For Organic Light Emitting Diode Modules
    Lin, Tsung-Hung
    Yang, Hsiharng
    Chao, Ching-Kong
    Shui, Hung-Chi
    2012 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP), 2012, : 224 - 229
  • [25] New dual-curvature microlens array with a high fill-factor for organic light emitting diode modules
    Lin, Tsung-Hung
    Yang, Hsiharng
    Chao, Ching-Kong
    Shui, Hung-Chi
    OPTICS COMMUNICATIONS, 2013, 304 : 123 - 128
  • [26] Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications
    Li, Sihua
    Xu, Jing
    Zhong, Shaolong
    Wu, Yaming
    SENSORS AND ACTUATORS A-PHYSICAL, 2011, 171 (02) : 274 - 282
  • [27] Design and fabrication of microlens and spatial filter array by self-alignment for maskless lithography systems
    Yang, R
    Chan, KF
    Feng, ZQ
    Akihito, I
    Mei, WH
    JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS, 2003, 2 (03): : 210 - 219
  • [28] Single-Shot Laser Additive Manufacturing of High Fill-Factor Microlens Arrays
    Surdo, Salvatore
    Carzino, Riccardo
    Diaspro, Alberto
    Duocastella, Marti
    ADVANCED OPTICAL MATERIALS, 2018, 6 (05):
  • [29] Planar Refractive Microlens Arrays with High Fill-Factor Fabricated by Polymer Replication Technique
    Nam, Minwoo
    Yang, Sang Sik
    Lee, Kee-Keun
    RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS AND NANODEVICES XI, 2012, 8250
  • [30] Fabrication of a high-fill-factor microlens array using different thermal reflow process
    Yang, Biao
    Zhou, Jinyun
    THIRD INTERNATIONAL CONFERENCE ON PHOTONICS AND OPTICAL ENGINEERING, 2019, 11052
12345