Charging of an irregularly shaped particle in the sheath of an rf plasma

被引:9
作者
Asnaz, Oguz Han [1 ]
Jung, Hendrik [1 ]
Greiner, Franko [1 ]
Piel, Alexander [1 ]
机构
[1] Univ Kiel, IEAP, D-24098 Kiel, Germany
关键词
MOTION; DUST;
D O I
10.1063/1.5038183
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The charging process of micrometer-sized irregularly shaped particles in the sheath of a radio frequency discharge is measured using a combination of long-distance microscopy and the phase-resolved resonance method. The applicability of the method is shown for a cylindrical zinc oxide particle by measuring its mass density. A particle with more complex geometry is compared to a spherical polymethyl methacrylate particle to investigate the charging of irregularly shaped particles in detail. The results are similar to the charging of the smallest enclosing sphere suggesting that the charging process is independent of the shape of the particle. Furthermore, molecular dynamics simulations were performed, which support the experimental results. Published by AIP Publishing.
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页数:5
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