FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure

被引：33

作者：

Aslam, Muhammad Zubair ^{[1
]}

Jeoti, Varun ^{[1
]}

Karuppanan, Saravanan ^{[2
]}

Malik, Aamir Farooq ^{[1
]}

Iqbal, Asif ^{[1
]}

机构：

[1] Univ Teknol PETRONAS, Dept Elect & Elect Engn, Seri Iskandar 32610, Perak, Malaysia

[2] Univ Teknol PETRONAS, Dept Mech Engn, Seri Iskandar 32610, Perak, Malaysia

来源：

SENSORS | 2018年 / 18卷 / 06期

关键词：

AlN; FEM simulation; Sezawa mode; VOC; SURFACE ACOUSTIC-WAVES; ZNO-SIO2-SI; WIRELESS; DEVICES;

D O I：

10.3390/s18061687

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A Finite Element Method (FEM) simulation study is conducted, aiming to scrutinize the sensitivity of Sezawa wave mode in a multilayer AlN/SiO2/Si Surface Acoustic Wave (SAW) sensor to low concentrations of Volatile Organic Compounds (VOCs), that is, trichloromethane, trichloroethylene, carbon tetrachloride and tetrachloroethene. A Complimentary Metal-Oxide Semiconductor (CMOS) compatible AlN/SiO2/Si based multilayer SAW resonator structure is taken into account for this purpose. In this study, first, the influence of AlN and SiO2 layers' thicknesses over phase velocities and electromechanical coupling coefficients (k(2)) of two SAW modes (i.e., Rayleigh and Sezawa) is analyzed and the optimal thicknesses of AlN and SiO2 layers are opted for best propagation characteristics. Next, the study is further extended to analyze the mass loading effect on resonance frequencies of SAW modes by coating a thin Polyisobutylene (PIB) polymer film over the AlN surface. Finally, the sensitivity of the two SAW modes is examined for VOCs. This study concluded that the sensitivity of Sezawa wave mode for 1 ppm of selected volatile organic gases is twice that of the Rayleigh wave mode.

引用

页数：13

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