Marangoni effect in nanosphere-enhanced laser nanopatterning of silicon

被引：59

作者：

Lu, Y ^{[1
]}

Theppakuttai, S ^{[1
]}

Chen, SC ^{[1
]}

机构：

[1] Univ Texas, Dept Mech Engn, Austin, TX 78712 USA

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 23期

关键词：

D O I：

10.1063/1.1581387

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report a Marangoni effect in nanosphere-enhanced laser direct nanopatterning of silicon surface. A monolayer of nanosphere array was formed on the silicon substrate by self-assembly. A 248-nm excimer laser was used to irradiate the sample surface. Due to optical field enhancement between the nanosphere and the substrate, the silicon surface was locally melted. The molten material was redistributed due to surface tension forces, resulting in the formation of a nanodent array. The morphology of the nanodents changed from bowl-type to "Sombrero'' with increase of laser intensity as a result of a Marangoni effect that arises due to the competition between a thermocapillary force and a chemicapillary force acting on the molten material. (C) 2003 American Institute of Physics.

引用

页码：4143 / 4145

页数：3