Subsurface Nanoimaging by Broadband Terahertz Pulse Near-Field Microscopy

被引:118
作者
Moon, Kiwon [1 ]
Park, Hongkyu [1 ]
Kim, Jeonghoi [1 ]
Do, Youngwoong [1 ]
Lee, Soonsung [1 ]
Lee, Gyuseok [1 ]
Kang, Hyeona [1 ]
Han, Haewook [1 ]
机构
[1] POSTECH, Dept Elect & Comp Engn, Pohang 790784, Kyungbuk, South Korea
基金
新加坡国家研究基金会;
关键词
Terhertz; near-field microscopy; subsurface nanoimaging; nanospectroscopy; OPTICAL MICROSCOPY; SPECTROSCOPY; RESOLUTION; NANOSCOPY; APERTURE; ARRAYS;
D O I
10.1021/nl503998v
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Combined with terahertz (THz) time-domain spectroscopy, THz near-field microscopy based on an atomic force microscope is a technique that, while challenging to implement, is invaluable for probing low-energy light-matter interactions of solid-state and biomolecular nanostructures, which are usually embedded in background media. Here, we experimentally demonstrate a broadband THz pulse near-field microscope that provides subsurface nanoimaging of a metallic grating embedded in a dielectric film. The THz near-field microscope can obtain broadband nanoimaging of the subsurface grating with a nearly frequency-independent lateral resolution of 90 nm, corresponding to similar to lambda/3300, at 1 THz, while the AFM only provides a flat surface topography.
引用
收藏
页码:549 / 552
页数:4
相关论文
共 40 条
  • [1] Broadband-infrared assessment of phonon resonance in scattering-type near-field microscopy
    Amarie, S.
    Keilmann, F.
    [J]. PHYSICAL REVIEW B, 2011, 83 (04)
  • [2] Tapered Sommerfeld wire terahertz near-field imaging
    Awad, M.
    Nagel, M.
    Kurz, H.
    [J]. APPLIED PHYSICS LETTERS, 2009, 94 (05)
  • [3] Bilbro LS, 2011, NAT PHYS, V7, P298, DOI [10.1038/nphys1912, 10.1038/NPHYS1912]
  • [4] Terahertz near-field microscopy of complementary planar metamaterials: Babinet's principle
    Bitzer, Andreas
    Ortner, Alex
    Merbold, Hannes
    Feurer, Thomas
    Walther, Markus
    [J]. OPTICS EXPRESS, 2011, 19 (03): : 2537 - 2545
  • [5] Real-time terahertz near-field microscope
    Blanchard, F.
    Doi, A.
    Tanaka, T.
    Hirori, H.
    Tanaka, H.
    Kadoya, Y.
    Tanaka, K.
    [J]. OPTICS EXPRESS, 2011, 19 (09): : 8277 - 8284
  • [6] Terahertz imaging with nanometer resolution
    Chen, HT
    Kersting, R
    Cho, GC
    [J]. APPLIED PHYSICS LETTERS, 2003, 83 (15) : 3009 - 3011
  • [7] Semiconductor dynamic aperture for near-field terahertz wave imaging
    Chen, Q
    Zhang, XC
    [J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2001, 7 (04) : 608 - 614
  • [8] Cocker TL, 2013, NAT PHOTONICS, V7, P620, DOI [10.1038/NPHOTON.2013.151, 10.1038/nphoton.2013.151]
  • [9] Analytical model for quantitative prediction of material contrasts in scattering-type near-field optical microscopy
    Cvitkovic, A.
    Ocelic, N.
    Hillenbrand, R.
    [J]. OPTICS EXPRESS, 2007, 15 (14): : 8550 - 8565
  • [10] Methods for fabricating arrays of holes using interference lithography
    Fernandez, A
    Decker, JY
    Herman, SM
    Phillion, DW
    Sweeney, DW
    Perry, MD
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06): : 2439 - 2443