Subsurface Nanoimaging by Broadband Terahertz Pulse Near-Field Microscopy

被引:119
|
作者
Moon, Kiwon [1 ]
Park, Hongkyu [1 ]
Kim, Jeonghoi [1 ]
Do, Youngwoong [1 ]
Lee, Soonsung [1 ]
Lee, Gyuseok [1 ]
Kang, Hyeona [1 ]
Han, Haewook [1 ]
机构
[1] POSTECH, Dept Elect & Comp Engn, Pohang 790784, Kyungbuk, South Korea
基金
新加坡国家研究基金会;
关键词
Terhertz; near-field microscopy; subsurface nanoimaging; nanospectroscopy; OPTICAL MICROSCOPY; SPECTROSCOPY; RESOLUTION; NANOSCOPY; APERTURE; ARRAYS;
D O I
10.1021/nl503998v
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Combined with terahertz (THz) time-domain spectroscopy, THz near-field microscopy based on an atomic force microscope is a technique that, while challenging to implement, is invaluable for probing low-energy light-matter interactions of solid-state and biomolecular nanostructures, which are usually embedded in background media. Here, we experimentally demonstrate a broadband THz pulse near-field microscope that provides subsurface nanoimaging of a metallic grating embedded in a dielectric film. The THz near-field microscope can obtain broadband nanoimaging of the subsurface grating with a nearly frequency-independent lateral resolution of 90 nm, corresponding to similar to lambda/3300, at 1 THz, while the AFM only provides a flat surface topography.
引用
收藏
页码:549 / 552
页数:4
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