Solution processed aluminum-doped ZnO thin films for transparent heater applications

被引：22
作者：
Tonbul, Beyza [1 ]
Can, Hilal Aybike [2 ]
Ozturk, Tayfur [2 ]
Akyildiz, Hasan [1 ,3 ]
机构：
[1] Konya Tech Univ, Dept Met & Mat Engn, Konya, Turkey
[2] Middle East Tech Univ, Dept Met & Mat Engn, Ankara, Turkey
[3] Konya Tech Univ, Applicat & Res Ctr, Nanotechnol & Adv Mat Dev, Konya, Turkey
来源：
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2021年 / 127卷
关键词：
AZO; Transparent heater; Ultrasonic spray pyrolysis; Optimization; ULTRASONIC SPRAY-PYROLYSIS; LOW-TEMPERATURE GROWTH; SUBSTRATE-TEMPERATURE; HIGHLY TRANSPARENT; ZINC ACETATE; AL; OXIDE; DEPOSITION; FABRICATION; ELECTRODES;
D O I：
10.1016/j.mssp.2021.105735
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A study was carried out to tailor the properties of ultrasonic spray pyrolysis deposited Al-doped ZnO (AZO) thin films suitable for transparent heater applications. For this purpose, the influences of solvent/precursor type and molarity, Al-doping concentration, nozzle to substrate distance, solution flow rate, carrier gas flow, substrate temperature, and post-deposition annealing on the microstructure, electrical, optical properties, and heating/ deicing behaviors of the films were investigated. The optimized heaters were produced on 50 x 75 mm(2) glass substrates at 400 degrees C with 750 nm thickness and annealed under forming gas for 90 min. This sample revealed a good sheet resistance value of 38.7 Omega/square and 83% transmittance in the visible region. Heating/deicing tests showed that the maximum achievable surface temperature was 76 degrees C under an applied potential of 12 V and all ice/water can be removed completely within 250 s. In addition, the AZO heater exhibited a very high thermal resistance value (409 degrees C cm(2)/Watts) with stable and reversible heating behavior.
引用
收藏
页数：10
相关论文
共 85 条
[1]  
Akyuz I, 2015, J CLEAN ENERGY TECHN, V4, P90
[2]  
[Anonymous], J For Sci
[3]   A comprehensive review on ultrasonic spray pyrolysis technique: Mechanism, main parameters and applications in condensed matter [J].
Ardekani, Saeed Rahemi ;
Aghdam, Alireza Sabour Rouh ;
Nazari, Mojtaba ;
Bayat, Amir ;
Yazdani, Elnaz ;
Saievar-Iranizad, Esmaiel .
JOURNAL OF ANALYTICAL AND APPLIED PYROLYSIS, 2019, 141
[4]  
Arnou P, 2014, 2014 IEEE 40TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), P308, DOI 10.1109/PVSC.2014.6924920
[5]   Rapid thermal annealing effect on the spatial resistivity distribution of AZO thin films deposited by pulsed-direct-current sputtering for solar cells applications [J].
Ayachi, Boubakeur ;
Aviles, Thomas ;
Vilcot, Jean-Pierre ;
Sion, Cathy .
APPLIED SURFACE SCIENCE, 2016, 366 :53-58
[6]   Structural Properties of Ultrasonically Sprayed Al-Doped ZnO (AZO) Thin Films: Effect of ZnO Buffer Layer on AZO [J].
Babu, B. J. ;
Velumani, S. ;
Arenas-Alatorre, J. ;
Kassiba, A. ;
Chavez, Jose ;
Park, Hyeonsik ;
Hussain, Shahzada Qamar ;
Yi, Junsin ;
Asomoza, R. .
JOURNAL OF ELECTRONIC MATERIALS, 2015, 44 (02) :699-705
[7]   Electrical and optical properties of ultrasonically sprayed Al-doped zinc oxide thin films [J].
Babu, B. J. ;
Maldonado, A. ;
Velumani, S. ;
Asomoza, R. .
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2010, 174 (1-3) :31-37
[8]   Thin and flexible transparent conductors with superior bendability having Al-doped ZnO layers with embedded Ag nanoparticles prepared by magnetron sputtering [J].
Barman, Dipak ;
Sarma, Bimal K. .
VACUUM, 2020, 177
[9]   Indium and aluminium-doped ZnO thin films deposited onto FTO substrates: nanostructure, optical, photoluminescence and electrical properties [J].
Benhaliliba, M. ;
Benouis, C. E. ;
Aida, M. S. ;
Yakuphanoglu, F. ;
Sanchez Juarez, A. .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2010, 55 (03) :335-342
[10]   Influence of aluminum concentration and substrate temperature on the physical characteristics of chemically sprayed ZnO: Al thin solid films deposited from zinc pentanedionate and aluminum pentanedionate [J].
Castaneda, L. ;
Silva-Gonzalez, R. ;
Gracia-Jimenez, J. M. ;
Hernandez-Torres, M. E. ;
Avendano-Alejo, M. ;
Marquez-Beltran, Cesar ;
Olvera, M. de la L. ;
Vega-Perez, J. ;
Maldonado, A. .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2010, 13 (02) :80-85
123456789