The use of x-ray interferometry to investigate the linearity of the NPL Differential Plane Mirror Optical Interferometer

被引:69
作者
Yacoot, A [1 ]
Downs, MJ [1 ]
机构
[1] Natl Phys Lab, Ctr Basic Thermal & Length Metrol, Teddington TW11 0LW, Middx, England
关键词
x-ray interferometry; differential optical interferometry; laser stability; fringe interpolation; sub-nanometric accuracy;
D O I
10.1088/0957-0233/11/8/305
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The x-ray interferometer from the combined optical and x-ray interferometer (COXI) facility at NPL has been used to investigate the performance of the NPL Jamin Differential Plane Mirror Interferometer when it is fitted with stabilized and unstabilized lasers. This Jamin interferometer employs a common path design using a double pass configuration and one fringe is realized by a displacement of 158 nm between its two plane mirror retroreflectors. Displacements over ranges of several optical fringes were measured simultaneously using the COXI x-ray interferometer and the Jamin interferometer and the results were compared. In order to realize the highest measurement accuracy from the Jamin interferometer, the air paths were shielded to prevent effects from air turbulence and electrical signals generated by the photodetectors were analysed and corrected using an optimizing routine in order to subdivide the optical fringes accurately. When an unstabilized laser was used the maximum peak-to-peak difference between the two interferometers was 80 pm, compared with 20 pm when the stabilized laser was used.
引用
收藏
页码:1126 / 1130
页数:5
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