Anodic Aluminum Oxide (AAO) Nano Membrane Fabrication under Different Conditions

被引:0
|
作者
Gujela, Om Prakash [1 ]
Gujela, Vidhatri [2 ]
Gayatri [3 ]
机构
[1] Manipal Univ Jaipur, Dept Mechatron Engn, Jaipur, Rajasthan, India
[2] HMFA Mem Inst Engn & Technol, Dept Elect & Elect Engn, Allahabad, Uttar Pradesh, India
[3] Sam Higginbottom Inst Agr Technol & Sci, Dept Biol Sci, Allahabad, Uttar Pradesh, India
来源
2016 INTERNATIONAL CONFERENCE ON RECENT ADVANCES AND INNOVATIONS IN ENGINEERING (ICRAIE) | 2016年
关键词
AAO membrane; MEMS; NEMS; Anodization; Electro-polishing; FILMS;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper presents research on the AAO membranes: its fabrication process, comparison and analysis of the results obtained under different conditions. For this research three types of aluminum sheets were used (based on purity), and on each type of aluminum sheet AAO membrane had been grown. The process include: cutting of Al sheet, cleaning in acetone and DI water, annealing, electro-polishing, first step of anodization, alumina etching, second step of anodization, aluminum etching and finally testing with Scanning Electron Microscope. Two types of anodization processes have been used for this research: mild anodization and hard anodization. Both process tested for three different type of Aluminum sheet for different time duration and finally results were obtained as SEM image has been compared and analyzed.
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页数:6
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