Numerical Analysis of X-Ray Diffraction Reflection Spectra of AlGaAs/GaAs Superlattices Depending on Structural Parameters

In this paper, we study the properties of X-ray diffraction reflection spectra of multilayer periodic AlGaAs/GaAs heterostructures depending on the thickness and composition of the layer material and number of periods. The number and intensity of additional diffraction maxima on the rocking curves are shown to increase with an increase in the layer thickness and number of periods. The layer composition does not affect the number of maxima but changes their angular position and the full width at half maximum. Numerical calculations were compared with experimental spectra measured for a heterostructure grown by molecular beam epitaxy and consisting of 50 periods in which the AlxGa1-xAs barrier had a composition of x approximate to 26.7% and a thickness of d approximate to 51.6 nm while the GaAs quantum well had a thickness of d approximate to 4.6 nm. The calculated parameters are found to be in good agreement with the technological data and the results of transmission electron microscope measurements.