WO3 Electrochromic Thin Films Doped With Carbon

被引：2
|
作者：
Lee, Chao-Te [1 ]
Chiang, Donyau [1 ]
Chiu, Po-Kai [1 ]
Chang, Chun-Ming [1 ]
Jaing, Cheng-Chung [2 ]
Ou, Sin-Liang [3 ]
Kao, Kuo-Sheng [4 ]
机构：
[1] Natl Appl Res Laboatories, Instrument Technol Res Ctr, Hsinchu 300, Taiwan
[2] Minghsin Univ Sci & Technol, Dept Optoelect Syst Engn, Hsinchu 304, Taiwan
[3] Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 402, Taiwan
[4] Shu Te Univ, Dept Comp & Commun, Kaohsiung 824, Taiwan
来源：
IEEE TRANSACTIONS ON MAGNETICS | 2014年 / 50卷 / 07期
关键词：
(WO3)(100-X)C-X thin films; reactive dc magnetron sputtering; bleaching; optical transmittance contrast; DEVICE;
D O I：
10.1109/TMAG.2013.2294867
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
(WO3)(100-X)C-X thin films (x = 0-9.3 at%) were cosputtered on indium-tin-oxide glass substrate with W and C targets by reactive dc magnetron sputtering at room temperature. The effects of doped C on the microstructure and optical properties of the (WO3)(100-X)C-X thin film were examined by field emission scanning electron microscopy with energy dispersive X-ray spectroscopy, X-ray diffraction, and a spectrophotometer. It was found that all of the as-deposited films were amorphous. The average transmittances of bleaching and colored WO3 film in the 400-700 nm range were 75% and 65.9%, respectively. The variation in average transmittance of the bleaching and colored states of (WO3)(90.7)C-9.3 film was 68.3%. The average transmittance of bleaching (WO3)(100-X)C-X thin films did not vary with C doping. However, the average transmittance of colored (WO3)(100-X)C-X film decreased to <48% after C doping. In addition, the optical transmittance contrast of (WO3)(100-X)C-X thin films was found to be suitable for blue laser wavelength recording.
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页数：4
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