Compact thermo-optic modulator based on a titanium dioxide micro-ring resonator

被引：13

作者：

Yu, Hongyan ^{[1
,2
,3
]}

Qiu, Feng ^{[2
,3
]}

机构：

[1] Zhejiang Univ, Hangzhou 310058, Zhejiang, Peoples R China

[2] Westlake Univ, Sch Engn, Key Lab 3D Micro Nano Fabricat & Characterizat Zh, 18 Shilongshan Rd, Hangzhou 310024, Zhejiang, Peoples R China

[3] Westlake Inst Adv Study, Inst Adv Technol, 18 Shilongshan Rd, Hangzhou 310024, Zhejiang, Peoples R China

来源：

OPTICS LETTERS | 2022年 / 47卷 / 08期

基金：

中国国家自然科学基金;

关键词：

REFRACTIVE-INDEXES; SILICON; COEFFICIENTS; SWITCH; LIGHT; SI3N4;

D O I：

10.1364/OL.456876

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Thermo-optic (TO) modulators with the ability of working from the visible to the infrared spectrum are promising for many emerging applications. However, current technologies suffer from either a limited operating spectrum range or weak TO effect. In this work, we present an effective TO modulator based on a titanium dioxide TiO2 micro-ring resonator with solgel SiO2 as the cladding. Taking advantage of the large negative TO coefficients of TiO2 and solgel SiO2, the fabricated device demonstrates a temperature-dependent wavelength shift of 58.3 pm/degrees C and a pi-shift power consumption of 7.8 mW. Since both TiO2 and solgel SiO2 have a broad transmission window, the demonstrated device will have wide applications in integrated optics from the visible to the infrared wavelength range. (C) 2022 Optica Publishing Group

引用

页码：2093 / 2096

页数：4

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