Facile tilted sputtering process (TSP) for enhanced H2S gas response over selectively loading Pt nanoparticles on SnO2 thin films

被引:24
作者
Eom, Nu Si A. [1 ,2 ]
Cho, Hong-Baek [1 ]
Lim, Hyo-Ryoung [1 ]
Kim, Bum Sung [2 ]
Choa, Yong-Ho [1 ]
机构
[1] Hanyang Univ, Dept Mat Sci & Chem Engn, ERICA Campus, Ansan, Gyeonggi Do, South Korea
[2] Korea Inst Ind Technol, Korea Inst Rare Met, Incheon 21999, South Korea
基金
新加坡国家研究基金会;
关键词
Selective Pt doping; Tilted sputtering process; H2S sensor; Catalysis; SnO2 thin film; TRANSPARENT CONDUCTING OXIDES; SENSING PROPERTIES; TEMPERATURE; SENSOR; GROWTH; SENSITIVITY; PERFORMANCE; FABRICATION; DEPOSITION; NANOWIRES;
D O I
10.1016/j.snb.2019.127009
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
In this paper, we present an enhanced H2S gas sensor based on selectively loading Pt nanocatalyst on the lateral surface of vertically aligned SnO2 thin film with nano-protrusion at a low temperature of 150 degrees C. For this purpose, a facile tilted sputtering process (TSP) to form a new, high surface area hierarchical nanostructure is proposed and envisaged in H2S gas sensor materials at different sensing temperatures. The vertically well aligned semiconductor tin dioxide (SnO2) nanostructured films with average nanorods with diameters ranging from 70-150 nm has been synthesized in which the diameter of the nanorods can be controlled by adjusting the spray pyrolysis deposition time and temperature. The inherent difficulty of detecting H2S gas at temperature lower than 200 degrees C with pure SnO2, were overcome by utilizing Pt/SnO2 thin films, which was synthesized via TSP. The Pt-SnO2 thin films with hierarchical nanostructure enhanced H2S gas response by a factor of 2 and the detection limit as low as 10 ppm compared to the thorough Pt loaded metal oxide at 150 degrees C. The adsorption sites of dissolved oxygen and analyte gas in relation to a TSP induced-Pt layers are elucidated for the enhanced H2S gas response. This work provides a simple, controllable approach that can be extended to the synthesis of other catalyst metal-loaded nanostructures based on metal oxides as gas sensor materials.
引用
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页数:8
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[1]   Gas sensing properties of defect-controlled ZnO-nanowire gas sensor [J].
Ahn, M. -W. ;
Park, K. -S. ;
Heo, J. -H. ;
Park, J. -G. ;
Kim, D. -W. ;
Choi, K. J. ;
Lee, J. -H. ;
Hong, S. -H. .
APPLIED PHYSICS LETTERS, 2008, 93 (26)
[2]   The gas response enhancement from ZnO film for H2 gas detection [J].
Al-Hardan, N. ;
Abdullah, M. J. ;
Aziz, A. Abdul .
APPLIED SURFACE SCIENCE, 2009, 255 (17) :7794-7797
[3]  
[Anonymous], 2013, J ELECT DEVICES
[4]   Perspectives on oblique angle deposition of thin films: From fundamentals to devices [J].
Barranco, Angel ;
Borras, Ana ;
Gonzalez-Elipe, Agustin R. ;
Palmero, Alberto .
PROGRESS IN MATERIALS SCIENCE, 2016, 76 :59-153
[5]   NO2 sensing properties of one-pot-synthesized ZnO nanowires with Pd functionalization [J].
Chen, Xiangxiang ;
Shen, Yanbai ;
Zhou, Pengfei ;
Zhao, Sikai ;
Zhong, Xiangxi ;
Li, Tingting ;
Han, Cong ;
Wei, Dezhou ;
Meng, Dan .
SENSORS AND ACTUATORS B-CHEMICAL, 2019, 280 :151-161
[6]   Response speed of SnO2-based H2S gas sensors with CuO nanoparticles [J].
Chowdhuri, A ;
Gupta, V ;
Sreenivas, K ;
Kumar, R ;
Mozumdar, S ;
Patanjali, PK .
APPLIED PHYSICS LETTERS, 2004, 84 (07) :1180-1182
[7]   Effect of Pt decoration on the gas response of ZnO nanoparticles [J].
Daryakenari, Ahmad Ahmadi ;
Apostoluk, Aleksandra ;
Delaunay, Jean-Jacques .
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 10, NO 10, 2013, 10 (10) :1297-1300
[8]   Tin dioxide/carbon nanotube composites with high uniform SnO2 loading as anode materials for lithium ion batteries [J].
Du, Guodong ;
Zhong, Chao ;
Zhang, Peng ;
Guo, Zaiping ;
Chen, Zhixin ;
Liu, Huakun .
ELECTROCHIMICA ACTA, 2010, 55 (07) :2582-2586
[9]   Room-temperature H2S gas sensing by selectively synthesized Cux(X=1,2)O:SnO2 thin film nanocomposites with oblique & vertically assembled SnO2 ceramic nanorods [J].
Eom, Nu Si A. ;
Cho, Hong-Baek ;
Song, Yoseb ;
Go, Gwang Myeong ;
Lee, Jimin ;
Choa, Yong-Ho .
SENSORS AND ACTUATORS B-CHEMICAL, 2018, 273 :1054-1061
[10]   Transparent conducting oxides for photovoltaics [J].
Fortunato, Elvira ;
Ginley, David ;
Hosono, Hideo ;
Paine, David C. .
MRS BULLETIN, 2007, 32 (03) :242-247