A CMOS-MEMS IR device based on double-layer thermocouples

被引：11

作者：

Lei, Cheng ^{[1
,2
]}

Mao, Haiyang ^{[2
,3
]}

Ou, Wen ^{[2
,3
]}

Xue, Chenyang ^{[1
]}

Tang, Licheng ^{[1
,2
]}

Yang, Tao ^{[2
,3
]}

Chen, Dapeng ^{[2
,3
]}

Xiong, Jijun ^{[1
]}

机构：

[1] North Univ China, Natl Key Lab Elect Measurement Technol, Taiyuan 030051, Peoples R China

[2] Chinese Acad Sci, Inst Microelect, Smart Sensing R&D Ctr, Beijing 100029, Peoples R China

[3] Jiangsu R&D Ctr Internet Things, Smart Sensor Engn Ctr, Wuxi 214135, Peoples R China

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2016年 / 22卷 / 05期

基金：

中国国家自然科学基金;

关键词：

THERMOPILE;

D O I：

10.1007/s00542-015-2688-z

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, a thermopile-based MEMS IR sensor is reported. In the device, a double-layer thermocouple strip structure and thermal-conductive-electrical-isolated structures are adopted thus to reduce the size and to improve performance of the whole device. After being packed into a TO-5 package, the sensor achieves a responsivity of 1151.14 V/W, a detectivity of 4.15 x 10(8) cm Hz(1/2)/W, and a response time of 14.46 ms. Besides, in measurements of varied temperatures and vacuum pressures, the thermopile proposed in this work could reach relatively high sensitivities. This indicates that such a device can also function as a temperature sensor and a vacuum sensor. In this way, the applications of thermopiles are broadened.

引用

页码：1163 / 1171

页数：9

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