Volume measurement based on dynamic differential pressure decay using AAO leak element

被引:0
作者
You, Dexue [1 ]
Wang, Yongjian [1 ]
Yu, Zhenhua [1 ]
Zhao, Yan [2 ]
Xi, Zhenhua [3 ]
Cheng, Yongjun [3 ]
Sun, Lichen [4 ]
Meng, Donghui [4 ]
Wang, Xudi [1 ]
机构
[1] Hefei Univ Technol, Sch Mech Engn, Hefei 230031, Anhui, Peoples R China
[2] Inst Northwest Nucl Technol, Xian 710024, Shaanxi, Peoples R China
[3] Lanzhou Inst Phys, Lanzhou 730000, Gansu, Peoples R China
[4] Beijing Inst Spacecraft Environm Engn, Beijing 100094, Peoples R China
基金
中国国家自然科学基金;
关键词
Constant conductance; Volume measurement; Molecular flow; Dynamic differential pressure decay; AAO leak element;
D O I
10.1016/j.vacuum.2019.108887
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A new technique to measure the volume of the metal container based on dynamic differential pressure decay by using anodic aluminum oxide (AAO) leak element is presented. The AAO is chosen as the leak element because its conductance remains constant from vacuum to atmosphere. The container to be measured is connected to the vacuum system via the AAO leak element. The dynamic differential pressure decay with time between the inlet and outlet of AAO leak assembly was measured and fitted by an exponential function, followed by volume calculation. The volume of two different containers has been obtained using this method with nitrogen, helium, and argon, respectively. The influence of temperature fluctuation on experimental results under vacuum and atmospheric pressure outlet conditions was discussed. For vacuum outlet conditions, the temperature change caused by pressure decay in one single experiment is small enough to satisfy the isothermal hypothesis, which makes the influence of temperature fluctuation on the experimental results negligible. The preliminary results compared with the static expansion method demonstrate that this novel volume measurement technique is accurate, simple and efficient. (C) 2019 Elsevier Ltd. All rights reserved.
引用
收藏
页数:5
相关论文
共 12 条
[1]   Measurement of volume change induced by a bulging of a diaphragm inside a differential type capacitance diaphragm gauge [J].
Arai, Kenta ;
Yoshida, Hajime ;
Kobata, Tokihiko .
MEASUREMENT, 2014, 48 :149-154
[2]   DETERMINATION OF VOLUMES BY GAS-EXPANSION [J].
GUILLOT, A ;
DANTZER, P .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1986, 19 (12) :1008-1009
[3]   SIMPLE METHOD FOR DETERMINING INTERNAL VOLUME OF A VACUUM-SYSTEM [J].
LEE, CO ;
PEAVEY, JH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (05) :1108-1109
[4]   Experiments on rarefied gas flows through tubes [J].
Marino, L. .
MICROFLUIDICS AND NANOFLUIDICS, 2009, 6 (01) :109-119
[5]   Highly ordered nanochannel-array architecture in anodic alumina [J].
Masuda, H ;
Yamada, H ;
Satoh, M ;
Asoh, H ;
Nakao, M ;
Tamamura, T .
APPLIED PHYSICS LETTERS, 1997, 71 (19) :2770-2772
[6]   A novel experimental setup for gas microflows [J].
Pitakarnnop, Jeerasak ;
Varoutis, Stelios ;
Valougeorgis, Dimitris ;
Geoffroy, Sandrine ;
Baldas, Lucien ;
Colin, Stephane .
MICROFLUIDICS AND NANOFLUIDICS, 2010, 8 (01) :57-72
[7]   Time-dependent methodology for non-stationary mass flow rate measurements in a long micro-tube [J].
Rojas-Cardenas, Marcos ;
Silva, Ernane ;
Ho, Minh-Tuan ;
Deschamps, Cesar J. ;
Graur, Irina .
MICROFLUIDICS AND NANOFLUIDICS, 2017, 21 (05)
[8]  
Rojas-Cardenas Marcos, 2017, MICROFLUID NANOFLUID, V21, P5
[9]  
Wang X.Y., 2014, INSTRUMENT TECHN SEN, V7, P97
[10]   Fabrication of conductance-controllable standard leak elements on anodic aluminum oxide using a selective coating method [J].
Wei, Benmeng ;
Zhao, Yongheng ;
Wang, Xudi ;
Wang, Yu ;
Wei, Wei ;
Qiu, Keqiang .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2017, 35 (04)