Nanoscale thermal analysis of electronic devices

Heat transfer at nanoscale is of importance for many nanotechnology applications. There are typically two types of problems. One is the management of heat; the other is to manipulate the heat flow and energy conversion. In this paper we review the status and progress of theoretical experimental investigations of thermal transport in nanoelectronics devices. In section 2, we discuss different regimes of nanoscale heat transfer phenomena. In section 3, we present an example including nanoscale phonon hotspots in transistors and finally in section 4, we summarize modeling tools for nanoscale heat transfer, followed by a summary of this paper.