Ion Implantation of Polypropylene Films for the Manufacture of Thin Film Capacitors

被引:0
作者
Haeublein, Volker [1 ]
Birnbaum, Erwin [1 ]
Ryssel, Heiner [1 ]
Frey, Lothar [1 ]
Djupmyr, Maerit [2 ]
机构
[1] Fraunhofer IISB, Schottkystr 10, D-91058 Erlangen, Germany
[2] EPCOS AG, Seewiesen 26, D-89520 Heidenheim, Germany
来源
2016 21ST INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT) | 2016年
关键词
Ion implantation; polypropylene; thin film capacitor; water vapor permeability;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper shows that ion implantation into polypropylene films can be used to improve the reliability of thin film capacitors. Hereby, the effect of a significantly reduced water vapor permeability is used. Thin film capacitors of implanted and non-implanted films were manufactured and characterized electrically. Especially climate tests show that implanted film capacitors maintain their capacitance and dissipation factor for a significantly longer period of time.
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页数:4
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