2016 21ST INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT)
|
2016年
关键词:
Ion implantation;
polypropylene;
thin film capacitor;
water vapor permeability;
D O I:
暂无
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
This paper shows that ion implantation into polypropylene films can be used to improve the reliability of thin film capacitors. Hereby, the effect of a significantly reduced water vapor permeability is used. Thin film capacitors of implanted and non-implanted films were manufactured and characterized electrically. Especially climate tests show that implanted film capacitors maintain their capacitance and dissipation factor for a significantly longer period of time.