Fine patterning of hybrid titania films by ultraviolet irradiation

被引：31

作者：

Segawa, H ^{[1
]}

Adachi, S ^{[1
]}

Arai, Y ^{[1
]}

Yoshida, K ^{[1
]}

机构：

[1] Oita Univ, Fac Engn, Dept Appl Chem, Dannoharu 8701192, Japan

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 2003年 / 86卷 / 05期

关键词：

D O I：

10.1111/j.1151-2916.2003.tb03371.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Photosensitive hybrid titania films have been prepared from titanium butoxide modified with beta-diketone and methacrylic acid. When this film is exposed to UV light, the beta-diketonato chelate from the alkoxide and beta-diketone is dissociated, and the unsaturated hydrocarbon of methacrylic acid is polymerized. These structural changes in the gel film have led to a difference between the solubility of irradiated and unirradiated parts in the film; therefore, a fine patternable hybrid titania film has been fabricated.

引用

页码：761 / 764

页数：4

共 50 条

[41] Preparation of titania/PDMS hybrid films and the conversion to porous materials [J].

Nakade, M ;

Ichihashi, K ;

Ogawa, M .

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2005, 36 (03) :257-264

[42] Preparation and photocatalytic properties of titania/perfluorosulfonated resin hybrid films [J].

Ding, Xingeng ;

Zhou, Simin ;

Liu, Jianxiang ;

Yang, Hui .

Kuei Suan Jen Hsueh Pao/Journal of the Chinese Ceramic Society, 2010, 38 (01) :74-77

[43] Preparation and characterization of perfluorosulfonic resin/titania hybrid transparent films [J].

LI JianMeiXUE MinZhaoZHANG YongMing LIU YanGang College of Chemistry and Chemical EngineeringShanghai Jiaotong UniversityShanghai China .

Science in China(Series B:Chemistry), 2007, (02) :243-248

[44] Photocatalytic micropatterning of transparent ethylsilsesquioxane-titania hybrid films [J].

Matsuda, A ;

Sasaki, T ;

Tadanaga, K ;

Tatsumisago, M ;

Minami, T .

CHEMISTRY OF MATERIALS, 2002, 14 (06) :2693-2700

[45] Preparation and characterization of perfluorosulfonic resin/titania hybrid transparent films [J].

Li JianMei ;

Xue MinZhao ;

Zhang YongMing ;

Liu YanGang .

SCIENCE IN CHINA SERIES B-CHEMISTRY, 2007, 50 (02) :243-248

[46] Fine patterning and characterization of gel films derived from methyltriethoxysilane and tetraethoxysilane [J].

Matsuda, Atsunori ;

Matsuno, Yoshihiro ;

Tatsumisago, Masahiro ;

Minami, Tsutomu .

1998, American Ceramic Soc, Westerville, OH, United States (81)

[47] Very Thin Extreme Ultraviolet Mask Absorber Material for Extremely Fine Pitch Patterning [J].

Lee, Jae Uk ;

Hong, Seongchul ;

Ahn, Jinho .

APPLIED PHYSICS EXPRESS, 2013, 6 (07)

[48] Patterning of fine-features in nanoporous films synthesized by spark ablation [J].

Ji, Xinrui ;

van Ginkel, Hendrik Joost ;

Hu, Dong ;

Schmidt-Ott, Andreas ;

van Zeijl, Henk ;

Vollebregt, Sten ;

Zhang, Guoqi .

2022 IEEE 22ND INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (NANO), 2022, :238-241

[49] Photosensitive barium strontium titanate gel films and their fine-patterning [J].

Zhang, Weihua ;

Zhao, Gaoyang ;

Li, Ying ;

Zhao, Wei .

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 2006, 27 (09) :1590-1594

[50] CHANGES IN FINE STRUCTURE OF PARTS OF CHROMOSOMES AFTER LOCALIZED ULTRAVIOLET IRRADIATION [J].

BLOOM, W .

ANNALS OF THE NEW YORK ACADEMY OF SCIENCES, 1960, 90 (02) :353-356

← 1 2 3 4 5 →