Fine patterning of hybrid titania films by ultraviolet irradiation

被引：31

作者：

Segawa, H ^{[1
]}

Adachi, S ^{[1
]}

Arai, Y ^{[1
]}

Yoshida, K ^{[1
]}

机构：

[1] Oita Univ, Fac Engn, Dept Appl Chem, Dannoharu 8701192, Japan

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 2003年 / 86卷 / 05期

关键词：

D O I：

10.1111/j.1151-2916.2003.tb03371.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Photosensitive hybrid titania films have been prepared from titanium butoxide modified with beta-diketone and methacrylic acid. When this film is exposed to UV light, the beta-diketonato chelate from the alkoxide and beta-diketone is dissociated, and the unsaturated hydrocarbon of methacrylic acid is polymerized. These structural changes in the gel film have led to a difference between the solubility of irradiated and unirradiated parts in the film; therefore, a fine patternable hybrid titania film has been fabricated.

引用

页码：761 / 764

页数：4

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