Fine patterning of hybrid titania films by ultraviolet irradiation

被引：31
|
作者：
Segawa, H [1 ]
Adachi, S [1 ]
Arai, Y [1 ]
Yoshida, K [1 ]
机构：
[1] Oita Univ, Fac Engn, Dept Appl Chem, Dannoharu 8701192, Japan
来源：
JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 2003年 / 86卷 / 05期
关键词：
D O I：
10.1111/j.1151-2916.2003.tb03371.x
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Photosensitive hybrid titania films have been prepared from titanium butoxide modified with beta-diketone and methacrylic acid. When this film is exposed to UV light, the beta-diketonato chelate from the alkoxide and beta-diketone is dissociated, and the unsaturated hydrocarbon of methacrylic acid is polymerized. These structural changes in the gel film have led to a difference between the solubility of irradiated and unirradiated parts in the film; therefore, a fine patternable hybrid titania film has been fabricated.
引用
收藏
页码：761 / 764
页数：4
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