High-responsivity solar-blind photodetector based on MOCVD-grown Si-doped β-Ga2O3 thin film*

被引：15

作者：

Zhi, Yu-Song ^{[1
,2
]}

Jiang, Wei-Yu ^{[1
,2
]}

Liu, Zeng ^{[1
,2
,6
,7
]}

Liu, Yuan-Yuan ^{[3
,4
]}

Chu, Xu-Long ^{[1
,2
,5
]}

Liu, Jia-Hang ^{[1
,2
]}

Li, Shan ^{[1
,2
]}

Yan, Zu-Yong ^{[1
,2
]}

Wang, Yue-Hui ^{[1
,2
]}

Li, Pei-Gang ^{[1
,2
]}

Wu, Zhen-Ping ^{[1
,2
]}

Tang, Wei-Hua ^{[1
,2
,6
,7
]}

机构：

[1] Beijing Univ Posts & Telecommun, Sch Sci, Lab Informat Funct Mat & Devices, Beijing 100876, Peoples R China

[2] Beijing Univ Posts & Telecommun, State Key Lab Informat Photon & Opt Commun, Beijing 100876, Peoples R China

[3] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China

[4] Chinese Acad Sci, Engn Res Ctr Semicond Integrated Technol, Inst Semicond, Beijing 100083, Peoples R China

[5] China Aerosp Syst Simulat Technol Co Ltd Beijing, Beijing 100195, Peoples R China

[6] Nanjing Univ Posts & Telecommun, Coll Elect & Opt Engn, Nanjing 210023, Peoples R China

[7] Nanjing Univ Posts & Telecommun, Coll Microelect, Nanjing 210023, Peoples R China

来源：

CHINESE PHYSICS B | 2021年 / 30卷 / 05期

基金：

中国国家自然科学基金;

关键词：

Si-doped β -Ga2O3; metal-organic chemical vapor deposition (MOCVD); solar-blind; high responsivity; ULTRAVIOLET PHOTODETECTOR; UV PHOTODETECTOR; HIGH-SENSITIVITY; PERFORMANCE; HETEROJUNCTION;

D O I：

10.1088/1674-1056/abe37a

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Si-doped beta-Ga2O3 films are fabricated through metal-organic chemical vapor deposition (MOCVD). Solar-blind ultraviolet (UV) photodetector (PD) based on the films is fabricated by standard photolithography, and the photodetection properties are investigated. The results show that the photocurrent increases to 11.2 mA under 200 mu W.cm(-2) 254 nm illumination and +/- 20 V bias, leading to photo-responsivity as high as 788 A.W-1. The Si-doped beta-Ga2O3-based PD is promised to perform solar-blind photodetection with high performance.

引用

页数：7

共 49 条

[1] Elevated temperature performance of Si-implanted solar-blind β-Ga2O3 photodetectors [J].

Ahn, Shihyun ;

Ren, Fan ;

Oh, Sooyeoun ;

Jung, Younghun ;

Kim, Jihyun ;

Mastro, Michael A. ;

Hite, Jennifer K. ;

Eddy, Charles R., Jr. ;

Pearton, S. J. .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2016, 34 (04)

[2] Solar blind Schottky photodiode based on an MOCVD-grown homoepitaxial β-Ga2O3 thin film [J].

Alema, Fikadu ;

Hertog, Brian ;

Mukhopadhyay, Partha ;

Zhang, Yuewei ;

Mauze, Akhil ;

Osinsky, Andrei ;

Schoenfeld, Winston V. ;

Speck, James S. ;

Vogt, Timothy .

APL MATERIALS, 2019, 7 (02)

[3] Solar blind photodetector based on epitaxial zinc doped Ga2O3 thin film [J].

Alema, Fikadu ;

Hertog, Brian ;

Ledyaev, Oleg ;

Volovik, Dmitry ;

Thoma, Grant ;

Miller, Ross ;

Osinsky, Andrei ;

Mukhopadhyay, Partha ;

Bakhshi, Sara ;

Ali, Haider ;

Schoenfeld, Winston V. .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2017, 214 (05)

[4] New concept ultraviolet photodetectors [J].

Chen, Hongyu ;

Liu, Kewei ;

Hu, Linfeng ;

Al-Ghamdi, Ahmed A. ;

Fang, Xiaosheng .

MATERIALS TODAY, 2015, 18 (09) :493-502

[5] Review of gallium-oxide-based solar-blind ultraviolet photodetectors [J].

Chen, Xuanhu ;

Ren, Fangfang ;

Gu, Shulin ;

Ye, Jiandong .

PHOTONICS RESEARCH, 2019, 7 (04) :381-415

[6] Ga2O3 photodetector arrays for solar-blind imaging [J].

Chen, Yan-Cheng ;

Lu, Ying-Jie ;

Liu, Qian ;

Lin, Chao-Nan ;

Guo, Juan ;

Zang, Jin-Hao ;

Tian, Yong-Zhi ;

Shan, Chong-Xin .

JOURNAL OF MATERIALS CHEMISTRY C, 2019, 7 (09) :2557-2562

[7] Self-powered diamond/β-Ga2O3 photodetectors for solar-blind imaging [J].

Chen, Yan-Cheng ;

Lu, Ying-Jie ;

Lin, Chao-Nan ;

Tian, Yong-Zhi ;

Gao, Chao-Jun ;

Dong, Lin ;

Shan, Chong-Xin .

JOURNAL OF MATERIALS CHEMISTRY C, 2018, 6 (21) :5727-5732

[8] 3D Solar-Blind Ga2O3 Photodetector Array Realized Via Origami Method [J].

Chen, Yancheng ;

Lu, Yingjie ;

Liao, Meiyong ;

Tian, Yongzhi ;

Liu, Qian ;

Gao, Chaojun ;

Yang, Xun ;

Shan, Chongxin .

ADVANCED FUNCTIONAL MATERIALS, 2019, 29 (50)

[9] Room-Temperature Fabricated Amorphous Ga2O3 High-Response-Speed Solar-Blind Photodetector on Rigid and Flexible Substrates [J].

Cui, Shujuan ;

Mei, Zengxia ;

Zhang, Yonghui ;

Liang, Huili ;

Du, Xiaolong .

ADVANCED OPTICAL MATERIALS, 2017, 5 (19)

[10] Solar-blind photodetector based on Ga2O3 nanowires array film growth from inserted Al2O3 ultrathin interlayers for improving responsivity [J].

Cui, Wei ;

Guo, Daoyou ;

Zhao, Xiaolong ;

Wu, Zhenping ;

Li, Peigang ;

Li, Linghong ;

Cui, Can ;

Tang, Weihua .

RSC ADVANCES, 2016, 6 (103) :100683-100689

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