ZnO-Based Transparent Electrodes: Optimization of Composition and Synthesis Conditions, Study of Properties

被引：1

作者：

Asvarov, A. Sh. ^{[1
]}

Abduev, A. Kh. ^{[1
]}

Akhmedov, A. K. ^{[1
]}

机构：

[1] Russian Acad Sci, Dagestan Sci Ctr, Amirkhanov Inst Phys, Makhachkala 367003, Russia

来源：

BULLETIN OF THE LEBEDEV PHYSICS INSTITUTE | 2010年 / 37卷 / 01期

基金：

俄罗斯基础研究基金会;

关键词：

zinc oxide; doping; magnetron sputtering; thin films; stability;

D O I：

10.3103/S1068335610010082

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We present the results of comparative studies of the characteristics of ZnO-based transparent conductive layers doped with gallium (GZO) and aluminum (AZO), grown by dc magnetron sputtering of ceramic targets at various substrate temperatures (T(sub)). Particular attention is paid to the study of stability of electrical characteristics of layers under temperature and humidity.

引用

页码：18 / 19

页数：2

共 3 条

[1] ABDUEV AK, 2004, Patent No. 2280015
[2] Structural, electrical, and optical properties of transparent conductive oxide ZnO:Al films prepared by dc magnetron reactive sputtering
Chen, M
Pei, ZL
Wang, X
Sung, C
Wen, LS
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2001, 19 (03): : 963 - 970
[3] Photoluminescence Characterization of Al-Doped ZnO Films Deposited by Using DC Magnetron Sputtering
Park, Se Hun
Park, Sang Eun
Lee, Jung Chul
Song, Pung Keun
Lee, Jin Ho
[J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2009, 54 (03) : 1344 - 1347

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