Total current collapse in High-Voltage GaN MIS-HEMTs induced by Zener trapping

被引:18
作者
Jin, D. [1 ]
Joh, J. [2 ]
Krishnan, S. [2 ]
Tipirneni, N. [2 ]
Pendharkar, S. [2 ]
del Alamo, J. A. [1 ]
机构
[1] MIT, Microsyst Technol Labs, Cambridge, MA 02139 USA
[2] Texas Inst, Dallas, TX 75243 USA
来源
2013 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) | 2013年
关键词
D O I
10.1109/IEDM.2013.6724572
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We investigate current collapse in GaN MIS-HEMTs for >600 V operation. Extreme trapping leading to total current collapse has been observed after OFF-state stress at high voltage. We attribute this to high-field tunneling-induced electron trapping ("Zener trapping") inside the AlGaN barrier or the GaN channel layers. The trapping takes place in a narrow region right under the edge of the outermost field plate in the drain portion of the device. The trapping characteristics are consistent with those responsible for the yellow luminescence band in GaN or AlGaN. This finding gives urgency to defect control during epitaxial-growth and the design of appropriate field plate structures for the reliable high-voltage operation of MIS-HEMTs.
引用
收藏
页数:4
相关论文
共 8 条
[1]   Yellow luminescence and related deep states in undoped GaN [J].
Calleja, E ;
Sanchez, FJ ;
Basak, D ;
SanchezGarcia, MA ;
Munoz, E ;
Izpura, I ;
Calle, F ;
Tijero, JMG ;
SanchezRojas, JL ;
Beaumont, B ;
Lorenzini, P ;
Gibart, P .
PHYSICAL REVIEW B, 1997, 55 (07) :4689-4694
[2]   1200-V Normally Off GaN-on-Si Field-Effect Transistors With Low Dynamic ON-Resistance [J].
Chu, Rongming ;
Corrion, Andrea ;
Chen, Mary ;
Li, Ray ;
Wong, Danny ;
Zehnder, Daniel ;
Hughes, Brian ;
Boutros, Karim .
IEEE ELECTRON DEVICE LETTERS, 2011, 32 (05) :632-634
[3]   ANOMALOUS LEAKAGE CURRENT IN LPCVD POLYSILICON MOSFETS [J].
FOSSUM, JG ;
ORTIZCONDE, A ;
SHICHIJO, H ;
BANERJEE, SK .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (09) :1878-1884
[4]   AlxGa1-xN/GaN band offsets determined by deep-level emission [J].
Hang, DR ;
Chen, CH ;
Chen, YF ;
Jiang, HX ;
Lin, JY .
JOURNAL OF APPLIED PHYSICS, 2001, 90 (04) :1887-1890
[5]  
Jin D, 2012, PROC INT SYMP POWER, P333, DOI 10.1109/ISPSD.2012.6229089
[6]   A Current-Transient Methodology for Trap Analysis for GaN High Electron Mobility Transistors [J].
Joh, Jungwoo ;
del Alamo, Jesus A. .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2011, 58 (01) :132-140
[7]   Carbon impurities and the yellow luminescence in GaN [J].
Lyons, J. L. ;
Janotti, A. ;
Van de Walle, C. G. .
APPLIED PHYSICS LETTERS, 2010, 97 (15)
[8]   Field-Plate Structure Dependence of Current Collapse Phenomena in High-Voltage GaN-HEMTs [J].
Saito, Wataru ;
Kakiuchi, Yorito ;
Nitta, Tomohiro ;
Saito, Yasunobu ;
Noda, Takao ;
Fujimoto, Hidetoshi ;
Yoshioka, Akira ;
Ohno, Tetsuya ;
Yamaguchi, Masakazu .
IEEE ELECTRON DEVICE LETTERS, 2010, 31 (07) :659-661