Introduction and overview

被引：0
作者：
Behrisch, Rainer [1 ]
Eckstein, Wolfgang [1 ]
机构：
[1] Max Planck Inst Plasma Phys, D-85748 Garching, Germany
来源：
SPUTTERING BY PARTICLE BOMBARDMENT: EXPERIMENTS AND COMPUTER CALCULATIONS FROM THRESHOLD TO MEV ENERGIES | 2007年 / 110卷
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中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The physics processes causing sputtering, i.e. the removal of atoms from the surface of solids or liquids at bombardment with particles having energies from the eV to the MeV range are today mostly understood. The erosion yields calculated with computer codes for different incident parameters agree reasonably well with experimentally measured yields; the same applies to energy and angular distributions. Sputtering is widely used for surface layer analysis, for removing surface atoms for thin film deposition and for surface machining.
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页码：1 / 20
页数：20
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