Measuring the Thickness of Ultra-Thin Film Layers Using Terahertz TimeDomain Polarimetry (THz-TDP)

被引：0

作者：

Bayati, Elyas ^{[1
]}

Winebrenner, Dale P. ^{[1
]}

Arbab, M. Hassan ^{[1
,2
]}

机构：

[1] Univ Washington, Seattle, WA 98105 USA

[2] SUNY Stony Brook, Stony Brook, NY 11794 USA

来源：

2017 42ND INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ) | 2017年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present experimental results from the application of our new terahertz full-polarimetry instrument, to measuring the thickness of ultra-thin films in a multi-layer coating system. While the standard time-of- flight measurement is limited by the bandwidth of the THz pulse in the minimum thickness resolution of the film that can be resolved using a time-domain system, the new terahertz time-domain polarimetry (THz-TDP) instrument can extend this limit to a few micrometers. This unique ability to measure the thickness of ultra-thin films (approximately./1000) is due to the accuracy of THz-TDP to resolve the polarization direction of the THz field within 1 degrees.

引用

页数：1