Low-frequency noise characteristics of epitaxial ZnO photoconductive sensors

被引:7
|
作者
Chang, S. P. [1 ]
Chang, S. J.
Chiou, Y. Z.
Lu, C. Y.
Lin, T. K.
Lin, Y. C.
Kuo, C. F.
Chang, H. M.
机构
[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Dept Elect Engn, Tainan 70101, Taiwan
[3] So Taiwan Univ Technol, Dept Elect Engn, Tainan 710, Taiwan
关键词
D O I
10.1149/1.2736658
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
We report the fabrication of epitaxial ZnO photoconductive sensors on sapphire substrates. With an incident light wavelength of 370 nm and a 5 V applied bias, we achieved a sensor responsivity of 20.5 mA/W. It was also found that low-frequency and high-frequency noises in the fabricated sensors were dominated by 1/f type and shot noises, respectively. With a 5 V applied bias, it was found that noise equivalent power and normalized detectivity of the fabricated sensors were 1.83 x 10(-6) W and 6.91 x 10(5) cm Hz(0.5) W-1, respectively. (C) 2007 The Electrochemical Society.
引用
收藏
页码:J209 / J211
页数:3
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