Effecting of oxygen and chlorine on nano-structured TiN/Si3N4 films hardness

被引：8
作者：
Ma, DY
Ma, SL
Xu, KW [1 ]
Veprek, S
机构：
[1] Xian Jiaotong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China
[2] Tech Univ Munich, Inst Chem Inorgan Mat, D-85747 Garching, Germany
来源：
MATERIALS LETTERS | 2005年 / 59卷 / 07期
基金：
中国国家自然科学基金;
关键词：
nc-TiN/a-Si3N4; superhard; oxygen; chlorine;
D O I：
10.1016/j.matlet.2004.10.062
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Using direct current plasma-enhanced chemical vapor deposition (PECVD) techniques, the nanocomposite coatings of nc-TiN/alpha-Si3N4 were deposited on stainless steel substrates. The coatings were characterized by nano-indentation, elastic recoil detection spectroscopy (ERD), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and transmission electron microscopy (TEM). The effects of oxygen and chlorine were investigated in this paper. A certain content of oxygen and chlorine can strongly decrease the hardness of superhard of nc-TiN/alpha-Si3N4 It is shown that 1-1.5 at.% of oxygen causes a decrease in hardness decrease to a value of about 30 GPa as compared to 45-55 GPa for a the that of below 0.2 at.% oxygen. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：838 / 841
页数：4
相关论文
共 15 条
[1]   THE PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION OF TIC, TIN AND TICXN1-X [J].
ARCHER, NJ .
THIN SOLID FILMS, 1981, 80 (1-3) :221-225
[2]   Mechanical properties and failure modes of TiAl(Si)N single and multilayer thin films [J].
Durand-Drouhin, O ;
Santana, AE ;
Karimi, A ;
Derflinger, VH ;
Schütze, A .
SURFACE & COATINGS TECHNOLOGY, 2003, 163 :260-266
[3]  
HILTON MR, 1987, THIN SOLID FILMS, V183, P278
[4]  
Karvankova P., 2003, THESIS TU MUNICH
[5]  
LI SZ, 1990, SURF COAT TECH, V43-4, P1007, DOI 10.1016/0257-8972(90)90039-F
[6]   Investigation on processing of industrial set-up plasma enhanced chemical vapor deposition with pulsed d.c. power [J].
Ma, SL ;
Li, YH ;
Xu, KW .
SURFACE & COATINGS TECHNOLOGY, 2000, 131 (1-3) :131-135
[7]   Thermal stability of superhard nanocomposite coatings consisting of immiscible nitrides [J].
Männling, HD ;
Patil, DS ;
Moto, K ;
Jilek, M ;
Veprek, S .
SURFACE & COATINGS TECHNOLOGY, 2001, 146 :263-267
[8]   Structural properties, internal stress and thermal stability of nc-TiN/a-Si3N4, nc-TiN/TiSix and nc-(Ti1-yAlySix)N superhard nanocomposite coatings reaching the hardness of diamond [J].
Niederhofer, A ;
Nesládek, P ;
Männling, HD ;
Moto, K ;
Veprek, S ;
Jílek, M .
SURFACE & COATINGS TECHNOLOGY, 1999, 120 :173-178
[9]  
OGUIR K, 1991, THIN SOLID FILMS, V195, P77
[10]  
PROCHAZKA J, 2003, THESIS TU MUNICH
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