Physical properties of erbium implanted tungsten oxide films deposited by reactive dual magnetron sputtering

Amorphous and partially crystalline WO3 thin films were prepared by reactive dual magnetron sputtering and successively implanted by erbium ions with a fluence in the range from 7.7 x 10(14) to 5 x 10(15) ions/cm(2). The electrical and optical properties were studied as a function of the film deposition parameters and the ion fluence. Ion implantation caused a strong decrease of the resistivity, a moderate decrease of the index of refraction and a moderate increase of the extinction coefficient in the visible and near infrared, while the optical band gap remained almost unchanged. These effects could be largely ascribed to ion-induced oxygen deficiency. When annealed in air, the already low resistivities of the implanted samples decreased further up to 70 degrees C, whereas oxidation, and hence a strong increase of the resistivity, was observed at higher annealing temperatures. (c) 2006 Elsevier B.V. All rights reserved.