X-ray waveguide nanostructures: Design, fabrication, and characterization

被引：8

作者：

Jarre, A. ^{[1
]}

Seeger, J.

Ollinger, C.

Fuhse, C.

David, C.

Salditt, T.

机构：

[1] Univ Gottingen, Inst Xray Phys, D-37077 Gottingen, Germany

[2] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland

来源：

JOURNAL OF APPLIED PHYSICS | 2007年 / 101卷 / 05期

关键词：

D O I：

10.1063/1.2435943

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Two dimensionally confining x-ray channel waveguide structures are fabricated and used for the delivery of nanoscopic x-ray beams. The waveguides can be combined with a high gain Kirkpatrick-Baez-prefocusing mirror system yielding hard x-ray beams with a cross section down to 25 nm (full width at half maximum). The incoming synchrotron x-ray beam is coupled in from the front side of the waveguide. Here we address the general design of the x-ray optical devices and their fabrication by e-beam lithography methods. (c) 2007 American Institute of Physics.

引用

页数：6