Micromachined inertial sensors: the state-of-the-art and a look into the future.

被引：35
作者：
Kraft, M [1 ]
机构：
[1] Univ Southampton, Dept Elect & Comp Sci, Microelect Res Grp, Southampton SO9 5NH, Hants, England
来源：
MEASUREMENT & CONTROL | 2000年 / 33卷 / 06期
关键词：
D O I：
10.1177/002029400003300601
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Inertial sensors were only restricted to applications such as military and aerospace systems in which the cost of these sensors was of little concern. The emergence of micromachining has generated the possibility of producing precision inertial sensors at a price which allows their use in cost-sensitive consumer applications. Different micromachined inertial sensor technologies which are available in the market are presented. Their features, specifications, and precisions are discussed.
引用
收藏
页码：164 / 168
页数：5
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