Micromachined inertial sensors: the state-of-the-art and a look into the future.

被引：35

作者：

Kraft, M ^{[1
]}

机构：

[1] Univ Southampton, Dept Elect & Comp Sci, Microelect Res Grp, Southampton SO9 5NH, Hants, England

来源：

MEASUREMENT & CONTROL | 2000年 / 33卷 / 06期

关键词：

D O I：

10.1177/002029400003300601

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Inertial sensors were only restricted to applications such as military and aerospace systems in which the cost of these sensors was of little concern. The emergence of micromachining has generated the possibility of producing precision inertial sensors at a price which allows their use in cost-sensitive consumer applications. Different micromachined inertial sensor technologies which are available in the market are presented. Their features, specifications, and precisions are discussed.

引用

页码：164 / 168

页数：5

共 25 条

[1]

*AN DEV, 1995, ADXL05 MON ACC SIGN

[2] Surface micromachined accelerometers [J].

Boser, BE ;

Howe, RT .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1996, 31 (03) :366-375

[3] Sealed-cavity resonant microbeam accelerometer [J].

Burns, DW ;

Horning, RD ;

Herb, WR ;

Zook, JD ;

Guckel, H .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 53 (1-3) :249-255

[4]

CLARK WA, 1996, SOL STAT SENS ACT WO, P283

[5]

de Coulon Y., 1993, 7 INT C SOL STAT SEN, P832

[6]

FUKATSU K, 1999, TRANSDUCER 99

[7] A new silicon rate gyroscope [J].

Geiger, W ;

Folkmer, B ;

Merz, J ;

Sandmaier, H ;

Lang, W .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 73 (1-2) :45-51

[8]

HOPKIN I, 1997, P S GYR TECHN STUTTG

[9] Polysilicon integrated microsystems: Technologies and applications [J].

Howe, RT ;

Boser, BE ;

Pisano, AP .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 56 (1-2) :167-177

[10]

JUNNEAU T, 1997, 9 INT C SOL STAT SEN, V2, P883

← 1 2 3 →