Scanning Joule expansion microscopy at nanometer scales

被引：110

作者：

Varesi, J

Majumdar, A ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

[2] Univ Calif Santa Barbara, Dept Mech Engn, Santa Barbara, CA 93106 USA

来源：

APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 01期

关键词：

D O I：

10.1063/1.120638

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report a new technique called scanning Joule expansion microscopy that can simultaneously image surface topography and material expansion due to Joule heating with vertical resolution in the 1 pm range and lateral resolution similar to that of an atomic force microscope. By coating the sample with a polymer film, we demonstrate that sample temperature distribution can be directly measured without the need of fabricating temperature-sensing scanning probes. (C) 1998 American Institute of Physics.

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页码：37 / 39

页数：3

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