[1] Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Hefei Natl Lab Phys Sci Microscale, Hefei 230026, Anhui, Peoples R China
[2] Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, CAS Key Lab Mech Behav & Design Mat, Hefei 230026, Anhui, Peoples R China
[3] Chinese Univ Hong Kong, Dept Mech & Automat Engn, Hong Kong 999077, Peoples R China
[4] Hefei Univ Technol, Inst Ind & Equipment Technol, Hefei 230009, Anhui, Peoples R China
[5] Wuhan Univ Technol, Int Sch Mat Sci & Engn, State Key Lab Adv Technol Mat Synth & Proc, Wuhan 430070, Hubei, Peoples R China