Micro-opto-electro-mechanical system for X-ray focusing

被引：2
作者：
Al-Aioubi, M.
Prewett, P. D. [1 ]
Huq, S. E.
Djakov, V.
Michette, A. G.
机构：
[1] Univ Birmingham, Dept Mech Engn, Birmingham B15 2TT, W Midlands, England
[2] Rutherford Appleton Lab, Cent Microstruct Facil, Didcot OX11 0QX, Oxon, England
[3] Kings Coll London, Dept Phys, London WC2R 2LS, England
[4] Damascus Univ, Dept Design & Prod Engn, Damascus, Syria
来源：
MICROELECTRONIC ENGINEERING | 2007年 / 84卷 / 5-8期
关键词：
MOEMS; X-ray focusing;
D O I：
10.1016/j.mee.2007.01.167
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A MOEMS system for 1-D focusing of X-rays has been fabricated using a thermal bimorph microcantilever to produce an element with variable focal length. A passive strain gauge is incorporated for feedback control of the zoom function. The focal length dependence on bimorph temperature has been measured. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：1252 / 1255
页数：4
相关论文
共 6 条
[1]   A novel MOEMS based adaptive optics for X-ray focusing [J].
Al Aioubi, M. Y. ;
Prewett, P. D. ;
Huq, S. E. ;
Djakov, V. ;
Michette, A. G. .
MICROELECTRONIC ENGINEERING, 2006, 83 (4-9) :1321-1325
[2]   Deflection and load characterisation of bimorph actuators for bioMEMS and other applications [J].
Al Aioubi, MY ;
Djakov, V ;
Huq, SE ;
Prewett, PD .
MICROELECTRONIC ENGINEERING, 2004, 73-4 :898-903
[3]   FORMATION OF OPTICAL IMAGES BY X-RAYS [J].
KIRKPATRICK, P ;
BAEZ, AV .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1948, 38 (09) :766-774
[4]   Low-dose radiation effects: Experimental hematology and the changing paradigm [J].
Mothersill, C ;
Seymour, C .
EXPERIMENTAL HEMATOLOGY, 2003, 31 (06) :437-445
[5]  
PREWETT PD, 2001, P SOC PHOTO-OPT INS, P4145
[6]   Polymer-based stress sensor with integrated readout [J].
Thaysen, J ;
Yalçinkaya, AD ;
Vettiger, P ;
Menon, A .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2002, 35 (21) :2698-2703
1