Materials optimization for magnetic MEMS

被引：19

作者：

Gibbs, Mike R. J. ^{[1
]}

机构：

[1] Univ Sheffield, Dept Mat Engn, SCAMMD, Sheffield S1 3JD, S Yorkshire, England

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2007年 / 43卷 / 06期

关键词：

magnetic layered films; magnetostrictive devices; microelectromechanical devices;

D O I：

10.1109/TMAG.2007.893764

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

By highlighting magnetomechanical effects such as the AE-effect, and developing modeling code that integrates magnetoelasticity with microelectromechanical systems, it is shown that a simple cantilever system can have a sensitivity to mass loading at the attogram level. The requirements on the magnetoelastic materials for such devices are described, and progress towards achieving optimized material is reviewed. The possibility for deployment of such systems in security, healthcare, and bioscience is outlined.

引用

页码：2666 / 2671

页数：6

共 27 条

[1] The use of stress for the control of magnetic anisotropy in amorphous FeSiBC thin films: a magneto-optic study [J].

Ali, M ;

Watts, R ;

Karl, WJ ;

Gibbs, MRJ .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1998, 190 (03) :199-204

[2]

Body C, 1997, J PHYS III, V7, P67, DOI 10.1051/jp3:1997111

[3] Magnetic microsensors: technology, properties, application [J].

Bolshakova, I .

SENSORS AND ACTUATORS A-PHYSICAL, 1998, 68 (1-3) :282-285

[4] THE CASE FOR MAGNETICALLY DRIVEN MICROACTUATORS [J].

BUSCHVISHNIAC, IJ .

SENSORS AND ACTUATORS A-PHYSICAL, 1992, 33 (03) :207-220

[5] Growth and magnetic characterization of epitaxial Fe81Ga19/MgO (100) thin films -: art. no. 033901 [J].

Butera, A ;

Gómez, J ;

Weston, JL ;

Barnard, JA .

JOURNAL OF APPLIED PHYSICS, 2005, 98 (03)

[6] Fe-based amorphous thin film as a magnetoelastic sensor material [J].

Chiriac, H ;

Pletea, M ;

Hristoforou, E .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 81 (1-3) :166-169

[7] Magnetoelastic characterization of thin films dedicated to magnetomechanical microsensor applications [J].

Chiriac, H ;

Pletea, M ;

Hristoforou, E .

SENSORS AND ACTUATORS A-PHYSICAL, 1998, 68 (1-3) :414-418

[8] Magnetostrictive properties of body-centered cubic Fe-Ga and Fe-Ga-Al alloys [J].

Clark, AE ;

Restorff, JB ;

Wun-Fogle, M ;

Lograsso, TA ;

Schlagel, DL .

IEEE TRANSACTIONS ON MAGNETICS, 2000, 36 (05) :3238-3240

[9] Sputter deposition of compositional gradient magnetostrictive FeCo based thin films [J].

Cooke, MD ;

Gibbs, MRJ ;

Pettifer, RF .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2001, 237 (02) :175-180

[10] Magnetic micro-actuators and systems (MAGMAS) [J].

Cugat, O ;

Delamare, J ;

Reyne, G .

IEEE TRANSACTIONS ON MAGNETICS, 2003, 39 (06) :3607-3612

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