Pulsed electron beam ablation of ferroelectric materials. spectroscopic investigation

被引：1
|
作者：
Nistor, M [1 ]
Gherendi, F [1 ]
Magureanu, M [1 ]
Mandache, NB [1 ]
Ioachim, A [1 ]
Banciu, G [1 ]
Dumitriu, D [1 ]
机构：
[1] Natl Inst Lasers Plasma & Radiat Phys, Lab 22, Bucharest, Romania
来源：
ROMOPTO 2003: SEVENTH CONFERENCE ON OPTICS | 2004年 / 5581卷
关键词：
pulsed electron beam; ablation plasma; time-resolved optical emission spectroscopy;
D O I：
10.1117/12.582814
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A compact pulsed electron beam source based on a channel-spark discharge was studied with the aim to find the optimum operating conditions for an efficient ablation of ferroelectric materials for thin-film deposition. The ablation plasma was studied by time-resolved optical emission spectroscopy. The temporal evolution of the spectral lines of target material and working gas was monitored. In the present discharge configuration a long lasting plasma is characteristic, as proved by the temporal evolution of excited atoms and ions.
引用
收藏
页码：350 / 355
页数：6
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