Static pull-in analysis of electrostatically actuated microbeams using homotopy perturbation method

被引：113

作者：

Mojahedi, M. ^{[1
]}

Moghimi Zand, Mahdi ^{[1
]}

Ahmadian, M. T. ^{[1
]}

机构：

[1] Sharif Univ Technol, Ctr Excellence Design Robot & Automat, Sch Mech Engn, Tehran, Iran

来源：

APPLIED MATHEMATICAL MODELLING | 2010年 / 34卷 / 04期

关键词：

Analytic solutions; Homotopy perturbation method; MEMS; Static pull-in instability; VOLTAGE; MICROSTRUCTURES; LOADS; MODEL;

D O I：

10.1016/j.apm.2009.07.013

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, static pull-in instability of electrostatically-actuated microbridges and micro-cantilevers is investigated considering different nonlinear effects. Galerkin's decomposition method is utilized to convert the nonlinear differential equations of motion to nonlinear integro-algebraic equations. Afterward, analytic solutions to static deflections of the microbeams are obtained using the homotopy perturbation method. Results are in excellent agreement with those presented in the literature. (C) 2009 Elsevier Inc. All rights reserved.

引用

页码：1032 / 1041

页数：10

共 28 条

[1] The application of homotopy analysis method to solve a generalized Hirota-Satsuma coupled KdV equation [J].

Abbasbandy, S. .

PHYSICS LETTERS A, 2007, 361 (06) :478-483

[2] The application of homotopy analysis method to nonlinear equations arising in heat transfer [J].

Abbasbandy, S. .

PHYSICS LETTERS A, 2006, 360 (01) :109-113

[3] Characterization of the mechanical behavior of an electrically actuated microbeam [J].

Abdel-Rahman, EM ;

Younis, MI ;

Nayfeh, AH .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2002, 12 (06) :759-766

[4]

[Anonymous], 2004, APPL MECH REV

[5] Experimental verification of a design methodology for torsion actuators based on a rapid pull-in solver [J].

Bochobza-Degani, O ;

Nemirovsky, Y .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2004, 13 (01) :121-130

[6] Modeling the pull-in parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model [J].

Bochobza-Degani, O ;

Nemirovsky, Y .

SENSORS AND ACTUATORS A-PHYSICAL, 2002, 97-8 :569-578

[7] An efficient DIPIE algorithm for CAD of electrostatically actuated MEMS devices [J].

Bochobza-Degani, O ;

Elata, D ;

Nemirovsky, Y .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, 11 (05) :612-620

[8] Improved analysis of microbeams under mechanical and electrostatic loads [J].

Choi, B ;

Lovell, EG .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1997, 7 (01) :24-29

[9] Analytical approach and numerical α-lines method for pull-in hyper-surface extraction of electrostatic actuators with multiple uncoupled voltage sources [J].

Elata, D ;

Bochobza-Degani, O ;

Nemirovsky, Y .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2003, 12 (05) :681-691

[10] On analytic solution for thin film flow of a fourth grade fluid down a vertical cylinder [J].

Hayat, T. ;

Sajid, M. .

PHYSICS LETTERS A, 2007, 361 (4-5) :316-322

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