Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

被引：4

作者：

Graeffe, J ^{[1
]}

Suhonen, M ^{[1
]}

Sipola, H ^{[1
]}

Sillanpää, T ^{[1
]}

机构：

[1] VTT Automat, Espoo 02044, Finland

来源：

DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS, PROCEEDINGS | 2000年 / 4019卷

关键词：

D O I：

10.1117/12.382277

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A light and fast 2-axial fine-pointing mirror has a number of space applications, especially in intersatellite optical links. The fine pointing of laser beams in optical links is currently realized with electromagnetic and piezoelectric actuators, which are relatively large and heavy. MEMS (Micro-Electro-Mechanical System) technology bears a high potential in space applications offering reduction of device size, mass and power consumption. Microtechnology makes batch mode fabrication possible yielding a low cost per unit. VTT Automation has designed and partially tested a silicon micromachined electrostatically actuated 2-axial mirror, which can be controlled with a microradian accuracy and a large bandwidth over the angular range of +/-3 mrad.

引用

页码：372 / 378

页数：7