Seed-free deposition of large-area adhesive diamond films on copper surfaces processed and patterned by femtosecond lasers

被引:3
作者
Fan, Lisha [1 ]
Zhou, Yun Shen [1 ]
Wang, Meng Meng [1 ]
Silvain, Jean-Francois [2 ]
Lu, Yong Feng [1 ]
机构
[1] Univ Nebraska, Dept Elect & Comp Engn, Lincoln, NE 68588 USA
[2] CNRS, ICMCB, 87 Ave Docteur Albert Schweitzer, F-33608 Pessac, France
基金
美国国家科学基金会;
关键词
Diamond; Copper; Thin film; Femtosecond laser processing; CARBON NANOTUBES; CVD DIAMOND; GROWTH; NUCLEATION; SUBSTRATE; MECHANISMS; PARTICLES;
D O I
10.1016/j.tsf.2017.06.058
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We demonstrate that femtosecond (fs) laser patterning of Cu can be exploited to realize seed-free deposition of large-area adhesive diamond films on Cu. Fs-laser-induced nanostructures promote diamond nucleation density and result in diamond film formation within a laser fluence window from 2.6 to 3.6 J cm(-2). Diamond films deposited on Cu surfaces prepared outside this window experience either complete film detachment or formation of low-quality ball-like diamond grains. Diamond/substrate interface roughness plays a critical role in controlling diamond quality and adhesion between substrates and diamond films. Large-area adhesive diamond films have been achieved on Cu substrate surfaces that were first modified with fs-laser irradiation and then scribed into grid patterns. The scribed channels function as expansion joints for stress relief. Strain-free diamond films have been achieved by optimizing the grid size. Using fs-laser processing for seed-free deposition of large-area diamond films on Cu is of great significance for diverse applications, such as thermal management and power electronic devices. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码:499 / 505
页数:7
相关论文
共 44 条
[31]   ADHESION MEASUREMENT OF THIN-FILMS [J].
MITTAL, KL .
ELECTROCOMPONENT SCIENCE AND TECHNOLOGY, 1976, 3 (01) :21-42
[32]   DIAMOND GRAIN-GROWTH ON CU SUBSTRATE [J].
OJIKA, S ;
YAMASHITA, S ;
KATAOKA, K ;
ISHIKURA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (11B) :L1681-L1683
[33]   MECHANISM FOR DIAMOND NUCLEATION AND GROWTH ON SINGLE-CRYSTAL COPPER SURFACES IMPLANTED WITH CARBON [J].
ONG, TP ;
XIONG, FL ;
CHANG, RPH ;
WHITE, CW .
APPLIED PHYSICS LETTERS, 1992, 60 (17) :2083-2085
[34]   DIAMOND NUCLEATION ON CLEAVED SI(111) [J].
POLINI, R .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (06) :2517-2519
[35]   Improved interfacial adhesion between diamond film and copper substrate using a Cu(Cr)-diamond composite interlayer [J].
Qiu, W. Q. ;
Liu, Z. W. ;
He, L. X. ;
Zeng, D. C. ;
Mai, Y. -W. .
MATERIALS LETTERS, 2012, 81 :155-157
[36]   SELECTIVE GROWTH OF DIAMOND CRYSTALS ON THE APEX OF SILICON PYRAMIDS [J].
RAMESHAM, R ;
ELLIS, C .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (05) :1189-1194
[37]   A review of diamond synthesis by CVD processes [J].
Schwander, Michael ;
Partes, Knut .
DIAMOND AND RELATED MATERIALS, 2011, 20 (09) :1287-1301
[38]   Direct femtosecond laser surface nano/microstructuring and its applications [J].
Vorobyev, Anatoliy Y. ;
Guo, Chunlei .
LASER & PHOTONICS REVIEWS, 2013, 7 (03) :385-407
[39]   Enhanced absorptance of gold following multipulse femtosecond laser ablation [J].
Vorobyev, AY ;
Guo, C .
PHYSICAL REVIEW B, 2005, 72 (19)
[40]   Plasma enhanced chemical vapor deposition of diamond coatings on Cu-W and Cu-WC composites [J].
Wan, B. Q. ;
Sun, X. Y. ;
Ma, H. T. ;
Feng, R. F. ;
Li, Y. S. ;
Yang, Q. .
SURFACE & COATINGS TECHNOLOGY, 2015, 284 :133-138