Seed-free deposition of large-area adhesive diamond films on copper surfaces processed and patterned by femtosecond lasers

被引:2
作者
Fan, Lisha [1 ]
Zhou, Yun Shen [1 ]
Wang, Meng Meng [1 ]
Silvain, Jean-Francois [2 ]
Lu, Yong Feng [1 ]
机构
[1] Univ Nebraska, Dept Elect & Comp Engn, Lincoln, NE 68588 USA
[2] CNRS, ICMCB, 87 Ave Docteur Albert Schweitzer, F-33608 Pessac, France
基金
美国国家科学基金会;
关键词
Diamond; Copper; Thin film; Femtosecond laser processing; CARBON NANOTUBES; CVD DIAMOND; GROWTH; NUCLEATION; SUBSTRATE; MECHANISMS; PARTICLES;
D O I
10.1016/j.tsf.2017.06.058
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We demonstrate that femtosecond (fs) laser patterning of Cu can be exploited to realize seed-free deposition of large-area adhesive diamond films on Cu. Fs-laser-induced nanostructures promote diamond nucleation density and result in diamond film formation within a laser fluence window from 2.6 to 3.6 J cm(-2). Diamond films deposited on Cu surfaces prepared outside this window experience either complete film detachment or formation of low-quality ball-like diamond grains. Diamond/substrate interface roughness plays a critical role in controlling diamond quality and adhesion between substrates and diamond films. Large-area adhesive diamond films have been achieved on Cu substrate surfaces that were first modified with fs-laser irradiation and then scribed into grid patterns. The scribed channels function as expansion joints for stress relief. Strain-free diamond films have been achieved by optimizing the grid size. Using fs-laser processing for seed-free deposition of large-area diamond films on Cu is of great significance for diverse applications, such as thermal management and power electronic devices. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码:499 / 505
页数:7
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