The role of Be incorporation in the modulation of the N doping ZnO

被引:19
作者
Chen, Mingming [1 ,2 ]
Zhu, Yuan [1 ]
Ji, Xu [1 ]
Chen, Anqi [1 ]
Su, Longxing [1 ]
Shen, Zhen [1 ]
Yang, Chunlei [3 ]
Xiang, Rong [1 ]
Gui, Xuchun [1 ]
Huang, Feng [1 ]
Tang, Zikang [1 ,4 ]
机构
[1] Sun Yat Sen Univ, Sch Phys & Engn, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R China
[2] Jiangsu Univ, Fac Sci, Zhenjiang 212013, Jiangsu, Peoples R China
[3] Chinese Acad Sci, Shen Zhen Inst Adv Technol, Ctr Photovolta & Solar Energy, Shenzhen, Peoples R China
[4] Hong Kong Univ Sci & Technol, Dept Phys, Kowloon, Hong Kong, Peoples R China
基金
中国国家自然科学基金;
关键词
p-Type conductivity; BeZnO:N; Raman spectroscopy; ZnO; P-TYPE ZNO; OPTICAL-PROPERTIES; FILMS; GROWTH; ACCEPTOR; MODES; OXIDE; GA; AL;
D O I
10.1016/j.jallcom.2014.08.179
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The low solubility of nitrogen in ZnO challenges the growth conditions for preparing p-type ZnO:N films. In this work, the effects of Be incorporation on the nitrogen doping ZnO are studied. The doping window for nitrogen mono-doping ZnO is very narrow. The nitrogen doping concentration in the ZnO:N is low, and greatly depends on the O/N ratio, Zn/O ratio and growth temperature parameters. However, the window for nitrogen doping can be substantially widened in the Be-N codoping ZnO process. The enhanced nitrogen doping level in the BeZnO:N films is fundamentally related to the strong Be-N bonds. Finally, p-type single-crystal hexagonal BeZnO:N films with more uniformly distributed nitrogen are obtained. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:719 / 724
页数:6
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