Piezoelectric Micromirrors with Geometric and Material Nonlinearities: Experimental Study and Numerical Modeling

被引：1

作者：

Opreni, Andrea ^{[1
]}

Frangi, Attilio ^{[1
]}

Boni, Nicolo ^{[2
]}

Mendicino, Gianluca ^{[2
]}

机构：

[1] Politecn Milan, Dept Civil & Environm Engn, Milan, Italy

[2] STMicroelectronics, Analog & MEMS Grp, Milan, Italy

来源：

2020 IEEE SENSORS | 2020年

关键词：

MEMS; micromirror; piezoelectric; nonlinear dynamic; PZT; harmonic balance; LONGITUDINAL VIBRATIONS; PARAMETRIC RESONANCE; NORMAL-MODES; FILMS; PIEZOCERAMICS; SYSTEMS;

D O I：

10.1109/sensors47125.2020.9278847

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper introduces a novel model to predict the dynamic response of piezoelectric micromirrors. The model addresses both geometric nonlinearities caused by large rotation amplitudes and the nonlinear response of piezoelectric films upon the application of large drive voltages. The proposed model is applied to predict the dynamic response of a MEMS micromirror actuated with PZT films. Numerical simulations are performed through the harmonic balance finite element method and results are validated with experimental data.

引用

页数：4

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