Parameters optimization on the lapping process for advanced ceramics by applying Taguchi method

被引：2
作者：
Yuan, Julong [1 ]
Lv, Binghai [1 ,2 ]
Zhou, Zhaozhong [1 ]
Tao, Baochun [1 ]
机构：
[1] Zhejiang Univ Technol, Ultraprecis Machining Res Ctr, Hangzhou 310014, Peoples R China
[2] Harbin Inst Technol, Dept Engn Mech, Harbin 15001, Peoples R China
来源：
ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY II | 2006年 / 532-533卷
关键词：
optimum design; Taguchi method; advanced ceramics; lapping;
D O I：
10.4028/www.scientific.net/MSF.532-533.488
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The surface quality is a critical factor affecting the performance and reliability of advanced ceramics. This paper focuses on the application of Taguchi method for optimization of advanced ceramics lapping process parameters to obtain the best finish. An optimization experiment for lapping silicon wafer with Al2O3 was designed by Taguchi method. Surface roughness Ra and Rt are considered as criteria for optimization. Influence of parameters involving load, speed, and slurry concentration for a given workmaterial with given abrasive (material and size) are discussed, and the optimum lapping conditions are figured out. Compared with single parameter experimental results, it illustrates that the experiment design based on Taguchi method can successfully applied to determine the optimum processing conditions for advanced ceramics lapping process.
引用
收藏
页码：488 / +
页数：2
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