Preliminary Investigation on a Sheet Plasma Produced by a Single Hot-Filament Cathode Discharge

被引：0

作者：

Feng Zhe ^{[1
]}

Guo Zhigang ^{[1
]}

Pu Yikang ^{[1
]}

Zhang Xiaozhang ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Engn Phys, Beijing 100084, Peoples R China

来源：

PLASMA SCIENCE & TECHNOLOGY | 2010年 / 12卷 / 03期

关键词：

hot-filament cathode; anode voltage; filament temperature; pressure; electron density; electron temperature; FIELD;

D O I：

10.1088/1009-0630/12/3/12

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A sheet plasma is generated by a mesh anode and a single hot-filament cathode with a DC power supply, and its characteristics are experimentally investigated. The sheet plasma is observed to locate around the anode. Both electron density and electron temperature derived from the average energy of the energetic electrons in nitrogen are estimated to be 10(8) cm(-3) and 20 similar to 40 eV, respectively, using the optical emission spectroscopy (OES) method based on a kinetic model of low-pressure nitrogen discharge. The electron density, electron temperature and their spatial distributions are found to be affected by the supplying voltage on the anode(70 V to 300 V), filament temperature (600 degrees C to 780 degrees C) and gas pressure (2 Pa to 20 Pa). By adjusting these parameters the discharge status can be easily controlled.

引用

页码：304 / 309

页数：6