Effect of Zn and Te beam intensity upon the film quality of ZnTe layers on severely lattice mismatched sapphire substrates by molecular beam epitaxy

被引:8
|
作者
Nakasu, Taizo [1 ]
Sun, W. [1 ]
Kobayashi, M. [1 ,2 ]
Asahi, T. [3 ]
机构
[1] Waseda Univ, Dept Elect Engn & Biosci, Shinjuku Ku, 3-4-1 Okubo, Tokyo 1698555, Japan
[2] Waseda Univ, Kagami Mem Res Inst Mat Sci & Technol, Shinjuku Ku, 2-8-26 Nishiwaseda, Tokyo 1690051, Japan
[3] JX Nippon Min & Met Corp, Technol Dev Grp, Chiyoda Ku, 100-8164 Otemachi, Tokyo 3191535, Japan
基金
日本学术振兴会;
关键词
X-ray diffraction; Molecular beam epitaxy; Zinc compounds; Sapphire; Semiconducting II-VI materials; Heterojunction semiconductor devices; VAPOR-PHASE EPITAXY; HOMOEPITAXIAL LAYERS; BUFFER LAYER; EPILAYERS; PHOTOLUMINESCENCE; GROWTH;
D O I
10.1016/j.jcrysgro.2016.11.035
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Zinc telluride layers were grown on highly-lattice-mismatched sapphire substrates by molecular beam epitaxy, and their crystallographic properties were studied by means of X-ray diffraction pole figures. The crystal quality of the ZnTe thin film was further studied by scanning electron microscopy, X-ray rocking curves and low-temperature photoluminescence measurements. These methods show that high-crystallinity (111)-oriented single domain ZnTe layers with the flat surface and good optical properties are realized when the beam intensity ratio of Zn and Te beams is adjusted. The migration of Zn and Te was inhibited by excess surface material and cracks were appeared. In particular, excess Te inhibited the formation of a high-crystallinity ZnTe film. The optical properties of the ZnTe layer revealed that the exciton-related features were dominant, and therefore the film quality was reasonably high even though the lattice constants and the crystal structures were severely mismatched.
引用
收藏
页码:635 / 637
页数:3
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