Micro- and nanotextured silicon for antireflective coatings of solar cells

被引：11

作者：

Druzhinin, Anatoly ^{[1
]}

Yerokhov, Valery ^{[1
]}

Nichkalo, Stepan ^{[1
]}

Berezhanskyi, Yevhen ^{[1
]}

机构：

[1] Lviv Polytech Natl Univ, S Bandera Str 12, UA-79013 Lvov, Ukraine

来源：

JOURNAL OF NANO RESEARCH | 2016年 / 39卷

关键词：

silicon; chemical etching; antireflection coating; solar cell; MULTICRYSTALLINE SILICON; NANOWIRES; LASER; LAYER; TEMPERATURE; EPITAXY; GROWTH; SI;

D O I：

10.4028/www.scientific.net/JNanoR.39.89

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The paper deals with obtaining of textured silicon surfaces by chemical etching. As a result of experiments based on the modification and optimization of obtaining a textured silicon, several methods of chemical texturing of the crystalline silicon surface were developed. It was shown that modified isotropic and anisotropic etching methods are applicable to create a microrelief on the surface of silicon substrate. These methods in addition to their high conversion efficiency can be used for both mono- and multicrystalline silicon which would ensure their industrial use.

引用

页码：89 / +

页数：9

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